Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method.

@article{Sikora2012HighlyST,
  title={Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-V{\"o}lklein method.},
  author={Adam S. Sikora and Hossein Ftouni and Jacques C. Richard and Cl{\'e}ment H{\'e}bert and David Eon and Frank Omnes and O. Bourgeois},
  journal={The Review of scientific instruments},
  year={2012},
  volume={83 5},
  pages={054902}
}
A suspended system for measuring the thermal properties of membranes is presented. The sensitive thermal measurement is based on the 3ω dynamic method coupled to a Völklein geometry. The device obtained using micro-machining processes allows the measurement of the in-plane thermal conductivity of a membrane with a sensitivity of less than 10 nW/K (+∕-5 × 10(-3) Wm(-1) K(-1) at room temperature) and a very high resolution (ΔK/K = 10(-3)). A transducer (heater/thermometer) centered on the… CONTINUE READING