Highly Reliable MEMS Temperature Sensors for 275 $^{ \circ}\hbox{C}$ Applications—Part 1: Design and Technology

This paper presents the design, fabrication, packaging, and experimental characterization of the first temperature-sensitive MEMS capacitors for health monitoring applications up to 275 °C. The capacitive sensor chip is 2 × 2 mm2 fabricated on a 500-μm -thick Si wafer and comprises an array of 220 individual 10 × 250 μm2 inherently robust bimorphs. This… (More)