Highly 111 oriented lead zirconate titanate thin films deposited using a non-polymeric route

  • M. H. M. Zaia, A. Akibaa, H. Gotoa, M. Matsumotoa, E. M. Yeatmanb
  • Published 2001

Abstract

This paper presents a simple non-polymeric solution route and its process conditions for depositing reproducible very highly Ž . Ž . Ž . 111 oriented lead zirconate titanate Pb Zr , Ti O abbreviated PZT thin films, with an excellent combination of 0.53 0.47 3 Ž . electrical properties, on Pt 111 Ti SiO Si wafers. Unlike sol gel derived routes, non-polymeric… (More)

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