Higher order correction of electrostatic pressure and its influence on the pull-in behavior of microstructures

@inproceedings{Krylov2006HigherOC,
  title={Higher order correction of electrostatic pressure and its influence on the pull-in behavior of microstructures},
  author={Slava Krylov and Shimon Seretensky},
  year={2006}
}
In close gap electrostatic microactuators modeling, distributed forces are commonly approximated using a parallel capacitor formula, adequate when the distance between electrodes is much smaller than their length. In the present work, using the perturbation theory, we develop simple expressions for electrostatic pressure with higher order corrections, mainly related to the curvature and slope of the electrode. These approximate expressions are validated through a comparison with analytical… CONTINUE READING

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