Higher Order Noise-Shaping Filters for High-Performance Micromachined Accelerometers

  title={Higher Order Noise-Shaping Filters for High-Performance Micromachined Accelerometers},
  author={Yufeng Dong and Michael Kraft and William Redman-White},
  journal={IEEE Transactions on Instrumentation and Measurement},
Micromachined inertial sensors that have been incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output. Previous work mainly focused on using the sensing element only to form a second-order single-loop sigma-delta modulator (SigmaDeltaM); however, the advantages of higher order single-loop electromechanical SigmaDeltaM have not been fully explored. High-performance inertial sensors require… CONTINUE READING
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