High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique.

Abstract

High-speed two-wavelength phase-shifting interferometry is presented. The technique is aimed at high-speed in-line inspection of spacers in liquid crystal display panels or wafer bumps where the measuring range is well determined and high-speed measurements are essential. With our test setup, the measuring range is extended to 10 μm by using two injection… (More)
DOI: 10.1364/AO.50.001541

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