High spatial resolution detection of low-energy electrons using an event-counting method, application to point projection microscopy.

Abstract

An event-counting method using a two-microchannel plate stack in a low-energy electron point projection microscope is implemented. 15 μm detector spatial resolution, i.e., the distance between first-neighbor microchannels, is demonstrated. This leads to a 7 times better microscope resolution. Compared to previous work with neutrons [Tremsin et al., Nucl… (More)
DOI: 10.1063/1.5020255

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