High resolution fabrication of Josephson microbridges

  title={High resolution fabrication of Josephson microbridges},
  author={D. E. Prober},
  journal={IEEE Transactions on Electron Devices},
  • D.E. Prober
  • Published 1981 in IEEE Transactions on Electron Devices
Recent advances in fabrication techniques and performance of 100-nm-scale superconducting Josephson microbridges are reviewed. Fabrication requirements imposed by the desired electrical performance are discussed; these lead to very small device dimensions and a three-dimensional structure to ensure good cooling of the active region. Fabrication approaches based on electron-beam lithography and on edge-defined patterning with substrate steps both achieve the desired dimensions and geometries… CONTINUE READING