High-resolution, back-side illuminated monolithic active pixel sensor for low-energy electron imaging

@article{Deptuch2005HighresolutionBI,
  title={High-resolution, back-side illuminated monolithic active pixel sensor for low-energy electron imaging},
  author={Grzegorz Deptuch and Wojciech Duliński and Massimo Caccia and M. Winter},
  journal={IEEE Transactions on Nuclear Science},
  year={2005},
  volume={52},
  pages={1745-1754}
}
A new domain of application of monolithic active pixel sensors, with respect to particle tracking, has been triggered by the innovative idea of a nondestructive beam monitoring system in the extraction lines of a hadron-therapy center. The beam monitoring exploits secondary electrons emitted from a submicrometer thick Al foil, intersecting the beam. Electrons are accelerated in an electrostatic field. The detection of low-energy electrons, up to 30 keV, is required. The sensitivity to these… CONTINUE READING

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