High refractive index nanocomposite fluids for immersion lithography.

Abstract

The concept of using dispersions of nanoparticles as high refractive index fluids in immersion lithography is examined both from a theoretical and experimental point of view. In the theoretical part we show that gelation and demixing can be controlled in high solid dispersions, needed to achieve a high (refractive) index, by using short stabilizing brushes… (More)
DOI: 10.1021/la8026896

Topics

24 Figures and Tables

Cite this paper

@article{Bremer2009HighRI, title={High refractive index nanocomposite fluids for immersion lithography.}, author={Leila Bremer and Remco Tuinier and S. H. Mousavi Jahromi}, journal={Langmuir : the ACS journal of surfaces and colloids}, year={2009}, volume={25 4}, pages={2390-401} }