# High quality three-dimensional aluminum microwave cavities

@article{Kudra2020HighQT, title={High quality three-dimensional aluminum microwave cavities}, author={Marina Kudra and J. Bizn{\'a}rov{\'a} and Anita Fadavi Roudsari and Jonathan J Burnett and David Niepce and Simone Gasparinetti and Bj{\"o}rn Wickman and Per Delsing}, journal={arXiv: Applied Physics}, year={2020} }

We present a comprehensive study of internal quality factors in superconducting stub-geometry 3-dimensional cavities made of aluminum. We use wet etching, annealing and electrochemichal polishing to improve the as machined quality factor. We find that the dominant loss channel is split between two-level system loss and an unknown source with 60:40 proportion. A total of 17 cavities of different purity, resonance frequency and size were studied. Our treatment results in reproducible cavities…

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