High-quality sample preparation by low kV FIB thinning for analytical TEM measurements.

  title={High-quality sample preparation by low kV FIB thinning for analytical TEM measurements.},
  author={Sara Bals and W. J. Tirry and Remco Geurts and Zhiqing Yang and Dominique U Schryvers},
  journal={Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada},
  volume={13 2},
Focused ion beam specimen preparation has been used for NiTi samples and SrTiO3/SrRuO3 multilayers with prevention of surface amorphization and Ga implantation by a 2-kV cleaning procedure. Transmission electron microscopy techniques show that the samples are of high quality with a controlled thickness over large scales. Furthermore, preferential thinning effects in multicompounds are avoided, which is important when analytical transmission electron microscopy measurements need to be… CONTINUE READING

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