High quality factor resonance at room temperature with nanostrings under high tensile stress

@inproceedings{Verbridge2006HighQF,
  title={High quality factor resonance at room temperature with nanostrings under high tensile stress},
  author={Scott S. Verbridge and Jeevak M. Parpia and Robert B. Reichenbach and Leon M. Bellan},
  year={2006}
}
Quality factors as high as 207 000 are demonstrated at room temperature for radio-frequency silicon nitride string resonators with cross sectional dimensions on the scale of 100 nm, made with a nonlithographic technique. A product of quality factor and surface to volume ratio greater than 6000 nm−1 is presented, the highest yet reported. Doubly clamped nanostring resonators are fabricated in high tensile-stress silicon nitride using a nonlithographic electrospinning process. We fabricate… CONTINUE READING
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