High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

  title={High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping},
  author={Hadi Najar and M. L. Chan and Hsueh-An Yang and Liwei Lin and David G. Cahill and David A. Horsley},
  journal={Applied Physics Letters},
We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m−1 K−1 for heat transport through the thickness… 

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