• DOI:10.1063/1.4871803
• Corpus ID: 120598050

High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

@article{Najar2014HighQF,
  title={High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping},
  author={Hadi Najar and M. L. Chan and Hsueh-An Yang and Liwei Lin and David G. Cahill and David A. Horsley},
  journal={Applied Physics Letters},
  year={2014},
  volume={104},
  pages={151903}
}

• H. Najar, M. Chan, +3 authors D. Horsley
• Published 16 April 2014
• Engineering, Materials Science
• Applied Physics Letters

We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m−1 K−1 for heat transport through the thickness of the diamond film. The resonant frequencies of the fabricated resonators were 46 kHz–8 MHz and showed a maximum measured Q ≈ 86 000 at fn = 46.849 kHz. The measured Q-factors are shown to be in good agreement with the limit imposed by thermoelastic dissipation calculated using the measured thermal conductivity. The mechanical properties extracted from resonant frequency measurements indicate a Young's elastic modulus of ≈788 GPa, close to that of microcrystalline diamond.