High quality factor and high confinement silicon resonators using etchless process

@article{Griffith2012HighQF,
  title={High quality factor and high confinement silicon resonators using etchless process},
  author={Austin G. Griffith and Jaime Cardenas and Carl B. Poitras and Michal Lipson},
  journal={2012 Conference on Lasers and Electro-Optics (CLEO)},
  year={2012},
  pages={1-2}
}
We demonstrate high-Q factor and high confinement silicon ring resonators fabricated by a local oxidation of silicon (LOCOS) process. We achieve an intrinsic quality factor of 525,000 in 410 μm-circumference ring resonator. 
Demonstration of compact high-Q silicon microring resonators suspended in air
  • W. Jiang, Jidong Zhang, Q. Lin
  • Materials Science
    2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications
  • 2014
We demonstrate compact silicon microring resonators suspended in air with ultra-high optical quality, achieving an intrinsic quality factor of 9.2×10<sup>5</sup> in the telecom band for the resonator
Ultrahigh-Q silicon resonators in a planarized local oxidation of silicon platform.
TLDR
This work describes a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor (Q factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique, and demonstrates the fabrication and the characterization of a microdisk resonator with an intrinsic Q factor that is one of the highest Q factors achieved with a compact silicon-on-insulator platform.
Fabrication Tolerant, Temperature Insensitive High-Q Nested Off-axis Microring Resonators
We propose single-bus internally-coupled nested microring resonators which are fabrication tolerant and maintain ultra-high Q irrespective of the rings’ coupling conditions. The arrangement is
Low-loss air-clad suspended silicon platform for mid-infrared photonics
We demonstrate a low-loss fully-air-clad suspended silicon platform for mid-infrared photonics. We fabricate a suspended microring resonator with a high quality factor of 83,000 at 3.79 μm wavelength
High-Q-Factor Silica-Based Racetrack Microring Resonators
In this paper, ultrahigh-Q factor racetrack microring resonators (MRRs) are demonstrated based on silica planar lightwave circuits (PLCs) platform. A loaded ultrahigh-Q factor Qload of 1.83 × 106 is
Ultra-high-Q thin-silicon nitride strip-loaded ring resonators.
TLDR
These first results are subject to further improvements that may allow employing strip-loaded resonators in nonlinear frequency conversion or quantum computing schemes within the desired spectral range provided by the material transparency.
On-Chip Ultra-High-Q Silicon Oxynitride Optical Resonators
Ultra-high-quality-factor (UHQ) optical resonators have enabled numerous fundamental scientific studies and advanced integrated photonic device technology. While free-standing devices can be
Silicon-chip mid-infrared frequency comb generation
  • Austin G. Griffith, R. Lau, +5 authors M. Lipson
  • Materials Science, Physics
    2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications
  • 2014
TLDR
It is reported that the first on-chip integrated mid-infrared frequency comb using a silicon optical parametric oscillator ring resonator is reported, and a 750-nm-wide comb centered at 2.6 um is demonstrated.
Ultrahigh-Q silicon racetrack resonators
An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides. It consists of two multimode straight waveguides connected by two multimode
Study of the pedestal process for reducing sidewall scattering in photonic waveguides.
TLDR
The numerical simulations demonstrate that roughness in sidewalls implicates in propagation losses which are at least five times larger that those in the bulk of the material, thus corroborating the idea behind the proposed method.
...
1
2
3
4
...

References

SHOWING 1-10 OF 25 REFERENCES
High quality factor etchless silicon photonic ring resonators
We demonstrate high-Q silicon ring resonators fabricated by selective oxidation without any silicon etching. We achieve an intrinsic quality factor of 510,000 in 50 μm-radius ring resonators with
High-Q silicon-on-insulator optical rib waveguide racetrack resonators.
TLDR
Resonators with quality factors (Q) as high as 119000 has been achieved, the highest Q value for resonators based on silicon-on-insulator rib waveguides to date with extinction ratios as large as 12 dB.
Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment.
TLDR
Measurements indicate that optical loss in these high-Q microresonators is limited not by surface roughness, but rather by surface state absorption and bulk free-carrier absorption.
Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks.
TLDR
An etch-free fabrication technique for creating low loss silicon waveguides in the silicon-on-insulator material system is proposed and demonstrated, bypassing the need for any wet or dry etching steps.
Compact silicon microring resonators with ultra-low propagation loss in the C band.
The propagation loss in compact silicon microring resonators is optimized with varied ring widths as well as bending radii. At the telecom band of 1.53-1.57 mum, we demonstrate as low as 3-4 dB/cm
Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation.
TLDR
A thermal oxidation fabrication technique is employed to form low-loss high-index-contrast silicon shallow-ridge waveguides in silicon-on-insulator (SOI) with maximally tight vertical confinement, with implications for sensor devices in particular.
Demonstration of submicron square-like silicon waveguide using optimized LOCOS process.
TLDR
The design, fabrication and experimental characterization of a submicron-scale silicon waveguide that is fabricated by local oxidation of silicon is demonstrated and the low loss characteristics of the waveguide are demonstrated by imaging the light scattering using an infrared camera.
Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper.
TLDR
A technique is demonstrated which efficiently transfers light between a tapered standard single-mode optical fiber and a high-Q, ultra-small mode volume, silicon photonic crystal resonant cavity, using this efficient cavity input and output channel to study the steady-state nonlinear absorption and dispersion of the photonics crystal cavity.
Athermal and low loss ridge silicon waveguides
In this paper, we investigate athermal and low propagation loss silicon-on-insulator (SOI) rib waveguides. Propagation losses have been modeled for different dimensions of ridge waveguides achieving
Nanotaper for compact mode conversion.
TLDR
It is shown that the micrometer-long silicon-on-insulator-based nanotaper coupler is able to efficiently convert both the mode field profile and the effective index, with a total length as short as 40 microm, during compact mode conversion between a fiber and a submicrometer waveguide.
...
1
2
3
...