High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding.

@article{Chen2008HighPG,
  title={High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding.},
  author={Long Chen and Po Dong and Michal Lipson},
  journal={Optics express},
  year={2008},
  volume={16 15},
  pages={11513-8}
}
We demonstrate germanium photodetectors integrated on submicron silicon waveguides fabricated with a low temperature ( <or=400 degrees C) wafer bonding and ion-cut process. The devices shows a low dark current of approximately 100 nA, a fiber accessed responsivity of > 0.4 A/W and an estimated quantum efficiency of above 90%. 
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References

Publications referenced by this paper.
Showing 1-10 of 21 references

31 GHz Ge nip waveguide photodetectors on SilicononInsulator substrate

G. Masini A. Altieri L. Colace, G. Assanto
Opt . Express • 2007

High speed and high responsivity germanium photodetector integrated in a SiliconOnInsulator microwaveguide

Y. Chetrit, D. Rubin, Mario J. Paniccia
Opt . Express • 2007

Ultracompact optical buffers on a silicon chip

R. Jones, O. Cohen, +3 authors M. Paniccia
Nature Photon . • 2007

Incorporation of a Photonic Layer at the Metallizations Levels of a CMOS Circuit

3rd IEEE International Conference on Group IV Photonics, 2006. • 2006

An allsilicon Raman laser

H. Park A. Fang, O. Cohen, R. Jones, M. Paniccia, J. Bowers
Nature • 2005

Ge - onSi vertical incidence photodiodes with 39GHz bandwidth

D. D. Cannon, K. Wada, +4 authors L. C. Kimerling
IEEE Photon . Technol . Lett . • 2005

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