High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

Abstract

We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-the-art. We demonstrated that operating our device in the… (More)

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Cite this paper

@article{Cheung2010HighperformanceMS, title={High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry}, author={Kerry Cheung and Luis Fernando Vel{\'a}squez-Garc{\'i}a and Akintunde Ibitayo Akinwande}, journal={2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)}, year={2010}, pages={867-870} }