High-frequency piezoelectric PZT film micromachined ultrasonic arrays

  title={High-frequency piezoelectric PZT film micromachined ultrasonic arrays},
  author={D. W. Wu and Q. F. Zhou and K. Kirk Shung and C. G. Liu and F. T. Djuth},
  journal={2008 IEEE Ultrasonics Symposium},
This paper presents the latest development of high-frequency PZT film ultrasonic linear arrays. A PZT thick film of 22 mum in thickness was fabricated with a spin-coating method. The film was found to have a remnant polarization of 30 muC/cm2 and a coercive field Ec of 70 KV/cm. A high-frequency linear array was successfully fabricated with the film. The array shows a center frequency of 80 MHz and a bandwidth (-6 dB) of 80% with a layer of parylene as the matching. Measured results also show… CONTINUE READING


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