High-efficiency wideband SiNx-on-SOI grating coupler with low fabrication complexity.


The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency… (More)
DOI: 10.1364/OL.42.003391