High-efficiency unitraveling-carrier photodiode with an integrated total-reflection mirror

  title={High-efficiency unitraveling-carrier photodiode with an integrated total-reflection mirror},
  author={Haruhiko Ito and Tomofumi Furuta and Satoshi Kodama and Tadao Ishibashi},
  journal={Journal of Lightwave Technology},
A novel photodiode (PD) structure with an integrated total-reflection mirror which can enhance the quantum efficiency in back-illuminated geometry is proposed. Due to the diagonal propagation of the reflected light at the total-reflection mirror through the absorption layer, the efficiency is improved by about 50% from that of the normally irradiated case. By employing a unitraveling-carrier structure together with a thick absorption layer of 4700 A, the fabricated PD exhibits a high… CONTINUE READING

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