# High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform.

@article{Wu2020HighefficiencyE3,
title={High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform.},
author={Dachuan Wu and Yasha Yi and Yuxiao Zhang},
journal={Applied optics},
year={2020},
volume={59 8},
pages={
2489-2497
}
}
• Published 26 November 2019
• Physics
• Applied optics
Beam-steering devices such as optical phased arrays (OPAs) are key components in the applications of solid-state Lidar and wireless communication. The traditional single-layer OPA results in a significant energy loss due to substrate leakage caused by the downward coupling from the grating coupler structure. In this work, we have investigated a structure based on a multi-layer ${\rm Si}_{3}{\rm N}_{4}/{\rm SiO}_{2}$Si3N4/SiO2 platform that can form a 3D OPA to emit light from the edge of the…
4 Citations

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## References

SHOWING 1-10 OF 18 REFERENCES

### End-fire silicon optical phased array with half-wavelength spacing

• Physics
• 2017
We demonstrate an optical phased array with emitting elements spaced at half the operational wavelength. The device is a one-dimensional array fabricated on an integrated silicon platform for

### Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

• Physics
• 2018
Chip-scale optical phased arrays could enable compact beam steering and LIDAR for autonomous vehicles, precision robotics, and free-space optical communications. Because these applications demand

### Integrated phased array for wide-angle beam steering.

• Physics
Optics letters
• 2014
We demonstrate an on-chip optical phased array fabricated in a CMOS compatible process with continuous, fast (100 kHz), wide-angle (51°) beam-steering suitable for applications such as low-cost LIDAR

### Silicon-Nitride-Assisted Edge Coupler Interfacing With High Numerical Aperture Fiber

• Physics
IEEE Photonics Technology Letters
• 2019
Reducing the mode size mismatch between high-index-contrast silicon waveguide and single-mode fiber takes an important role in photonic integration. A low-loss and broadband silicon-nitride-assisted

### Efficient TE/TM spot-size converter for broadband coupling to single mode fibers

• Physics
OSA Continuum
• 2019
We present the novel design of a spot-size converter (SSC) for high efficiency coupling between a conventional single-mode fiber (SMF) and a standard silicon nanowire. Our design involves evanescent

### 1×256 multi-layer, low-loss, Si3N4 waveguide optical phased arrays with 0.050° instantaneous-field-of-view

• Physics
2017 Conference on Lasers and Electro-Optics (CLEO)
• 2017
We report multilayer 1×256 Si<inf>3</inf>N<inf>4</inf> optical phased arrays with 8-stage multimode interferometer (MMI) tree. The device shows 4.5 μm mode size, 3 dB excess loss and far field

### On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

• Physics
• 2010
In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a

### Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator.

• Physics
Optics letters
• 2009
An integrated approach is followed in which a 1D optical phased array is fabricated on silicon-on-insulator in which continuous thermo-optical steering of 2.3 degrees and wavelength steering of 14.1 degrees is reported.

### Compound period grating coupler for double beam generation and steering.

• Physics
Applied optics
• 2019
The investigation of fabrication tolerance shows that the new compound period grating coupler structure can couple the waveguide mode into two radiation modes with different angles, and the beam steering range is doubled due to the extra beam.

### Two-dimensional beam-steering device using a doubly periodic Si photonic-crystal waveguide.

• Physics
Optics express
• 2018
We demonstrate a nonmechanical, on-chip optical beam-steering device using a photonic-crystal waveguide with a doubly periodic structure that repeats the increase and decrease of the hole diameter.