High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform.

  title={High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform.},
  author={Dachuan Wu and Yasha Yi and Yuxiao Zhang},
  journal={Applied optics},
  volume={59 8},
Beam-steering devices such as optical phased arrays (OPAs) are key components in the applications of solid-state Lidar and wireless communication. The traditional single-layer OPA results in a significant energy loss due to substrate leakage caused by the downward coupling from the grating coupler structure. In this work, we have investigated a structure based on a multi-layer ${\rm Si}_{3}{\rm N}_{4}/{\rm SiO}_{2}$Si3N4/SiO2 platform that can form a 3D OPA to emit light from the edge of the… 

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