High efficiency 850 nm Vertical-Cavity Surface-Emitting Laser using fan-pad metallization and trench patterning

Abstract

In this paper, fan-pad metallization and trench patterning were introduced in 850 nm Vertical-Cavity Surface-Emitting Laser (VCSEL) device packaging. Low threshold current and series resistance, which contributes to higher VCSEL efficiency, are obtained for the VCSEL with fan-metallization and trench patterning fabricated devices. Further, the output… (More)

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