High-contrast waveguides in sputtered pure TeO2 glass thin films.

Abstract

We present a technological approach to the realization of channeled optical waveguides, starting from reactively sputtered tellurite glass thin films, grown on silica-coated 4" Si wafers. In particular, optical lithographic process and etching recipes have been developed to overcome the solubility of TeO(2) films in aqueous solutions, and to process them… (More)

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