High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography.

Abstract

Scanning electron microscopy and atomic force microscopy are well-established techniques for imaging surfaces with nanometer resolution. Here we demonstrate a complementary and powerful approach based on tabletop extreme-ultraviolet ptychography that enables quantitative full field imaging with higher contrast than other techniques, and with compositional… (More)
DOI: 10.1016/j.ultramic.2015.07.006

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