High Voltage Compatible Micromachined Vacuum Electronic Devices with Carbon Nanotube Cold Cathodes

Abstract

Previously, Bower et al. demonstrated a microfabricaied vacuum microtriode with an integrated carbon nanotube field emission cathode. One of the main limitations of the microtriode was the inadequate device insulation which suffered from leakage currents and electrical breakdown at fewer than 200 Volts. Here, we report similar micromachined vacuum… (More)

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