High-Temperature Leakage Improvement in Metal–Insulator–Metal Capacitors by Work–Function Tuning

Abstract

Using low-cost and high work-function Ni, a low leakage current of 5times10<sup>-6</sup> A/cm<sup>2</sup> at 125 degC is obtained in a high 25-fF/mum<sup>2</sup>-density SrTiO<sub>3</sub> metal-insulator-metal (MIM) capacitor processed at 400 degC. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added… (More)

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Cite this paper

@article{Chiang2007HighTemperatureLI, title={High-Temperature Leakage Improvement in Metal–Insulator–Metal Capacitors by Work–Function Tuning}, author={K. C. Chiang and C. H. Cheng and H. C. Pan and C. N. Hsiao and C. P. Chou and Alex Chin and H. L. Hwang}, journal={IEEE Electron Device Letters}, year={2007}, volume={28}, pages={235-237} }