High-Speed MEMS-Based Gas Chromatography

  title={High-Speed MEMS-Based Gas Chromatography},
  author={Masoud Agah and G. Lambertus and R. Sacks and K. D. Wise},
  journal={IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.},
This paper reports microfabricated silicon-glass separation columns for high-speed micro gas chromatography (muGC) systems. The microfabricated columns are integrated with resistive heaters and temperatures sensors and capacitive pressure sensors to allow temperature and pressure programming and flow control and to achieve reproducible separations in a muGC system. These 25-cm-long, 150-mum-wide, and 250-mum-deep columns are fabricated on a 1.2-cm square die using a silicon-on-glass dissolved… CONTINUE READING
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