High-Sensitivity Image Sensors Overlaid With Thin-Film Gallium Oxide/Crystalline Selenium Heterojunction Photodiodes

Abstract

We developed a stacked CMOS image sensor overlaid with a thin-film gallium oxide (Ga2O3)/crystalline selenium (c-Se) heterojunction photodiode. Uniform c-Se films laminated on the CMOS circuits were fabricated through a low-temperature (200 °C) tellurium-diffused crystallization process. This stacking structure has several advantages, such as a high… (More)

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