High Quality YBa 2 Cu 3 O 7x Superconducting Thin Films Grown by MOCVD

@inproceedings{Dubourdieu2016HighQY,
  title={High Quality YBa 2 Cu 3 O 7x Superconducting Thin Films Grown by MOCVD},
  author={C. Dubourdieu and J. P. S{\'e}nateur and Olivier Thomas and François Weiss},
  year={2016}
}
YBCO thin films have been grown by Metal Organic Chemical Vapour Deposition in ;I cold wall type reactor. The 0-diketonates of yttrium, barium and copper are used as precursors. Filrna have bcen deposited on (001 I MgO and (012) LaA103 single crystalline substrates. The morphology is very dependant on thc gas p h a x composition. Different oxygen partial pressures have been investigated. An increasing oxygen partial prcasul-c at a fixed deposition temperature is found to increase the growth… CONTINUE READING