High-Q micromechanical resonators in a two-dimensional phononic crystal slab

@inproceedings{Mohammadi2009HighQMR,
  title={High-Q micromechanical resonators in a two-dimensional phononic crystal slab},
  author={Saeed Mohammadi and A. A. Eftekhar and William D. Hunt and Ali Adibi},
  year={2009}
}
By creating line defects in the structure of a phononic crystal PC made by etching a hexagonal array of holes in a 15 m thick slab of silicon, high-Q PC resonators are fabricated using a complimentary-metal-oxide-semiconductor-compatible process. The complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126 MHz. The confinement of acoustic energy is achieved by using only a few PC layers confining the cavity… CONTINUE READING
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Downloaded 13 Feb 2009 to 130.207.50.192. Redistribution subject to AIP license or copyright

Downloaded 13 Feb 2009 to 130.207.50.192. Redistribution subject to AIP license or copyright

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