High-Q UHF micromechanical radial-contour mode disk resonators

@article{Clark2005HighQUM,
  title={High-Q UHF micromechanical radial-contour mode disk resonators},
  author={J Clark and W.-T. Hsu and M. A. Abdelmoneum and C.T.-C. Nguyen},
  journal={Journal of Microelectromechanical Systems},
  year={2005},
  volume={14},
  pages={1298-1310}
}
A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies as high as 829 MHz and with Q's as high as 23 000 at 193 MHz. Furthermore, the resonators have been demonstrated operating in the first three radial contour modes, allowing a significant frequency increase without scaling the device, and a 193 MHz resonator has… CONTINUE READING

Citations

Publications citing this paper.
SHOWING 1-10 OF 113 CITATIONS

Development of a low damping MEMS resonator

VIEW 8 EXCERPTS
CITES BACKGROUND
HIGHLY INFLUENCED

Nickel Vibrating Micromechanical Disk Resonator with Solid Dielectric Capacitive-Transducer Gap

  • 2006 IEEE International Frequency Control Symposium and Exposition
  • 2006
VIEW 5 EXCERPTS

A lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

  • 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
  • 2017
VIEW 3 EXCERPTS
CITES BACKGROUND
HIGHLY INFLUENCED

Micromachined Resonators: A Review

VIEW 5 EXCERPTS
CITES BACKGROUND
HIGHLY INFLUENCED

Opto Acoustic Oscillator Using Silicon Rf Mems Based Optical Modulator

VIEW 5 EXCERPTS
CITES BACKGROUND & METHODS
HIGHLY INFLUENCED

Reducing anchor loss in micromechanical extensional mode resonators

  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
  • 2010
VIEW 4 EXCERPTS
CITES METHODS & BACKGROUND
HIGHLY INFLUENCED

Enhanced transduction methods for electrostatically driven MEMS resonators

  • TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
  • 2009
VIEW 3 EXCERPTS
CITES BACKGROUND & METHODS
HIGHLY INFLUENCED

FILTER CITATIONS BY YEAR

2006
2019

CITATION STATISTICS

  • 8 Highly Influenced Citations

  • Averaged 5 Citations per year from 2017 through 2019

References

Publications referenced by this paper.
SHOWING 1-10 OF 21 REFERENCES

VHF free-free beam high-Q micromechanical resonators

  • Journal of Microelectromechanical Systems
  • 1999
VIEW 7 EXCERPTS

Micromechanical Mixer+Filters

VIEW 7 EXCERPTS
HIGHLY INFLUENTIAL

Free-free beam silicon carbide nanomechanical resonators

  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003

SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps

  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
VIEW 1 EXCERPT

Self-aligned 1.14-GHz vibrating radial-mode disk resonators

  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
VIEW 2 EXCERPTS

Stemless wine-glass-mode disk micromechanical resonators

  • The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
  • 2003
VIEW 1 EXCERPT

A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators

  • Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
  • 2001
VIEW 1 EXCERPT

Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators

  • Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
  • 2001
VIEW 2 EXCERPTS