High-Q Micromachined Inductors for 10-to-30-GHz RFIC Applications on Low Resistivity Si-Substrate

@article{Wang2006HighQMI,
  title={High-Q Micromachined Inductors for 10-to-30-GHz RFIC Applications on Low Resistivity Si-Substrate},
  author={To-Po Wang and Huei Wang},
  journal={2006 European Microwave Conference},
  year={2006},
  pages={56-59}
}
The measured results for quality factor improvement and self-resonance frequency (fsr) improvement of the planar inductors implemented in 0.35-mum two-poly-four-metal (2P4M) CMOS process are presented in this paper. These inductors are fabricated on a low resistivity Si-substrate with a resistance about 33 Omega-cm. It is observed that the quality factors… CONTINUE READING