High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

@article{Wu2022HighProductionRateFO,
  title={High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)},
  author={Rongbo Wu and Lan Gao and Youting Liang and Yong Zheng and Junxia Zhou and Hongxing Qi and Difeng Yin and Min Wang and Zhiwei Fang and Ya Cheng},
  journal={Micromachines},
  year={2022},
  volume={13}
}
Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high performance thin-film LN EO modulator using photolithography assisted chemo-mechanical etching (PLACE) technology. Our device shows a 3-dB bandwidth over 50 GHz, along with a comparable low half wave… 

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