High-Performance Control of Piezoelectric Tube Scanners

@article{Bhikkaji2007HighPerformanceCO,
  title={High-Performance Control of Piezoelectric Tube Scanners},
  author={Bharath Bhikkaji and Mani Maran Ratnam and Andrew J. Fleming and S. O. Reza Moheimani},
  journal={IEEE Transactions on Control Systems Technology},
  year={2007},
  volume={15},
  pages={853-866}
}
In this paper, a piezoelectric tube of the type typically used in scanning tunneling microscopes (STMs) and atomic force microscopes (AFMs) is considered. Actuation of this piezoelectric tube is hampered by the presence of a lightly damped low-frequency resonant mode. The resonant mode is identified and damped using a positive velocity and position feedback (PVPF) controller, a control technique proposed in this paper. Input signals are then shaped such that the closed-loop system tracks a… CONTINUE READING

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Feedback control of piezoelectric tube scanners

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