High-K thin films as dielectric transducers for flexural M/NEMS resonators

@article{Fuinel2016HighKTF,
  title={High-K thin films as dielectric transducers for flexural M/NEMS resonators},
  author={C{\'e}cile Fuinel and Khadim Daffe and Adrian Laborde and O. Thomas and Laurent Mazenq and Liviu Nicu and Thierry Leichl{\'e} and Bernard Legrand},
  journal={2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2016},
  pages={1193-1196}
}
We show that a nanometer-thick high-K material can be used as an electromechanical transducer to actuate the flexural mode of micro/nanoresonators. In this study, a 15 nm silicon nitride layer is employed on top of 320 nm thick silicon beams. The devices, smaller by 2 orders of magnitude than in previous studies [1], are successfully driven into vibration at resonance frequencies greater than 1 MHz, nanometer amplitudes, and quality factors greater than 2,000 in vacuum. We also deduce the… CONTINUE READING