High-K thin films as dielectric transducers for flexural M/NEMS resonators

  • Cécile Fuinel, Khadim Daffe, +5 authors Bernard Legrand
  • Published 2016 in
    2016 IEEE 29th International Conference on Micro…
We show that a nanometer-thick high-K material can be used as an electromechanical transducer to actuate the flexural mode of micro/nanoresonators. In this study, a 15 nm silicon nitride layer is employed on top of 320 nm thick silicon beams. The devices, smaller by 2 orders of magnitude than in previous studies [1], are successfully driven into vibration… (More)