High-Gain AlGaN Solar-Blind Avalanche Photodiodes

@article{Shao2014HighGainAS,
  title={High-Gain AlGaN Solar-Blind Avalanche Photodiodes},
  author={Zhen Guang Shao and Dun Jun Chen and Hai Lu and Rong Zhang and Da Peng Cao and Wen Jun Luo and You Dou Zheng and Liang Li and Zhong Hui Li},
  journal={IEEE Electron Device Letters},
  year={2014},
  volume={35},
  pages={372-374}
}
This letter reports high performance AlGaN solar-blind avalanche photodiodes (APDs) with separate absorption and multiplication structure grown by metal-organic chemical vapor deposition on AlN templates. In fabricating APD devices, we applied a photo-electrochemical treatment process after mesa etching to reduce damage induced by etching. After introducing this process, the leakage current of the fabricated devices was reduced obviously and a record-high gain of 1.2×104 at the reverse bias of… CONTINUE READING
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