High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications

@article{Colombo2020HighFigureofMeritXL,
  title={High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications},
  author={L. Colombo and A. Kochhar and Gabriel Vidal-{\'A}lvarez and G. Piazza},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control},
  year={2020},
  volume={67},
  pages={1392-1402}
}
  • L. Colombo, A. Kochhar, +1 author G. Piazza
  • Published 2020
  • Physics, Medicine
  • IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  • This article reports on the modeling, design, fabrication, and testing of high-performance X-cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The objective of this work is to exploit the high figure of merit (FoM)—product of quality factor at series resonance (<inline-formula> <tex-math notation="LaTeX">${Q}_{s}$ </tex-math></inline-formula>) and electromechanical coupling (<inline-formula> <tex-math notation="LaTeX">${k}_{t}^{{2}}$ </tex-math></inline… CONTINUE READING
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