High Energy Radial Deposition of Diamond-Like Carbon Coatings

@inproceedings{Suschke2015HighER,
  title={High Energy Radial Deposition of Diamond-Like Carbon Coatings},
  author={Konrad Suschke and Rene Huebner and Peter Paul Murmu and Prasanth Gupta and John Futter and Andreas Markwitz},
  year={2015}
}
Diamond-like carbon (DLC) coatings were deposited with a new direct ion deposition system using a novel 360 degree ion source operating at acceleration voltage between 4 and 8 kV. Cross-sectional TEM images show that the coatings have a three layered structure which originates from changes in the deposition parameters taking into account ion source… CONTINUE READING