High Dynamic Range Pixel Array Detector for Scanning Transmission Electron Microscopy

  title={High Dynamic Range Pixel Array Detector for Scanning Transmission Electron Microscopy},
  author={Mark Tate and Prafull Purohit and Darol Chamberlain and Kayla X. Nguyen and Robert Hovden and Celesta S. Chang and Pratiti Deb and Emrah Turgut and John T. Heron and Darrell G. Schlom and Daniel C Ralph and Gregory D. Fuchs and Katherine Shanks and Hugh T. Philipp and David A. Muller and Sol M. Gruner},
  journal={Microscopy and Microanalysis},
  pages={237 - 249}
Abstract We describe a hybrid pixel array detector (electron microscope pixel array detector, or EMPAD) adapted for use in electron microscope applications, especially as a universal detector for scanning transmission electron microscopy. The 128×128 pixel detector consists of a 500 µm thick silicon diode array bump-bonded pixel-by-pixel to an application-specific integrated circuit. The in-pixel circuitry provides a 1,000,000:1 dynamic range within a single frame, allowing the direct electron… Expand

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