High‐Performance, High‐Index‐Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non‐planar Substrates

@article{Zou2013HighPerformanceHC,
  title={High‐Performance, High‐Index‐Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non‐planar Substrates},
  author={Yi Zou and Danning Zhang and Hongtao Lin and Lan Li and Loise Moreel and Jie Zhou and Qingyang Du and Okechukwu Ogbuu and Sylvain Danto and John David Musgraves and Kathleen A. Richardson and Kevin D. Dobson and Robert W. Birkmire and Juejun Hu},
  journal={Advanced Optical Materials},
  year={2013},
  volume={2},
  pages={478-486}
}
This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal… Expand

Figures and Tables from this paper

5 × 5 cm2 silicon photonic crystal slabs on glass and plastic foil exhibiting broadband absorption and high-intensity near-fields
TLDR
The broadband light trapping efficiency of the arrays is among the best values reported for large-area experimental crystalline silicon nanostructures, and might become a promising platform for ultrathin solar cells on lightweight substrates, high-sensitive optical biosensors, and nonlinear optics. Expand
Chalcogenide glass-on-graphene photonics
Two-dimensional (2D) materials are of tremendous interest to integrated photonics, given their singular optical characteristics spanning light emission, modulation, saturable absorption and nonlinearExpand
High-Q ring resonators directly written in As 2 S 3 chalcogenide glass films
Planar ring resonator waveguides are fabricated in thin films of As2S3 chalcogenide glass, deposited on silica-on-silicon substrates. Waveguide cores are directly written by scanning the focusedExpand
Surface plasticizing of chalcogenide glasses: a route for direct nanoimprint with multifunctional antireflective and highly hydrophobic structures.
TLDR
A novel, robust, and scalable approach for the direct patterning of chalcogenide glasses, based on soft imprinting of a solvent-plasticized glass layer formed on the glass surface, with an unprecedented combination of full pattern transfer and complete maintenance of the shape of the imprinted substrate. Expand
Low-loss photonic device in Ge-Sb-S chalcogenide glass.
TLDR
This work investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching, and demonstrated high-index-contrast waveguides and microdisk resonators with an intrinsic quality factor of 1.2×106. Expand
Surface plasticizing of chalcogenide glasses: a route for direct nanoimprint with multifunctional antireflective and highly hydrophobic structures
Chalcogenide glasses are attractive materials for optical applications. However, these applications often require pattering of the surface with functional micro-/ nanostructures, which is challengingExpand
Nanoscale optical features via hot-stamping of As2Se3 glass
Here we show our ability to fabricate two-dimensional (2D) gratings on chalcogenide glasses with peak-to-valley amplitude of ~200 nm. The fabrication method relies on the thermal nano-imprinting ofExpand
Direct Imprint of Optical Functionalities on Free‐Form Chalcogenide Glasses
DOI: 10.1002/adom.201900652 optical nonlinearity due to the low phonon energy of the bonds between heavy chalcogen atoms, and thus are very attractive for all-optical switching.[5] Also, chalcogenideExpand
Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching
A chlorine plasma etching-based method for the fabrication of high-performance chalcogenide-based integrated photonics on silicon substrates is presented. By optimizing the etching conditions,Expand
A fluid-guided printing strategy for patterning high refractive index photonic microarrays
Abstract High refractive index (HRI, n > 1.8) photonic structures offer strong light confinement and refractive efficiencies, cover the entire visible spectrum and can be tuned by designing geometricExpand
...
1
2
3
4
5
...

References

SHOWING 1-10 OF 63 REFERENCES
Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology.
TLDR
A low cost approach to produce large-area polymer sheets with sub-wavelength nanostructures that could generate the gradient of the refractive indices, absorb the light and greatly reduce the reflectivity of PMMA with SWSs is presented. Expand
Planar waveguide-coupled, high-index-contrast, high-Q resonators in chalcogenide glass for sensing.
TLDR
A lab-on-a-chip prototype sensor device with the integration of the resonator with planar microfluidic systems is demonstrated and shows a refractive index sensitivity of 182 nm/RIU (refractive index unit) and a wavelength resolution of 0.1 pm through a resonant peak fit. Expand
Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor.
TLDR
It is shown in this letter that using this device, N-methylaniline can be detected using its well-defined absorption fingerprint of the N-H bond near 1496 nm, and given the low-cost fabrication process used, and robust device configuration, the integration scheme provides a promising device platform for chemical sensing applications. Expand
Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides.
TLDR
Two complementary soft lithography methods are demonstrated for patterning and integrating chalcogenide glass waveguides from solution to create a diverse array of mid-IR optical and photonic structures ranging from <5 to 10's of µm in dimension. Expand
Exploration of waveguide fabrication from thermally evaporated Ge–Sb–S glass films
Abstract Waveguides from thermally evaporated Ge 23 Sb 7 S 70 films have been fabricated using both plasma etching and lift-off techniques. The two methods have been compared in their ability toExpand
Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography.
TLDR
The fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp with extremely smooth sidewalls and optical losses limited by Rayleigh scattering is reported. Expand
High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates
The ability of microto nanometer-scale patterning on flexible substrates can enable many new applications in the area of photonics and organic electronics. A major roadblock has remained for manyExpand
A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process
Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced forExpand
Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow.
TLDR
A technique is developed to calculate waveguide optical loss using the roughness evolution model, and the ultimate low loss limit in reflowed high-index-contrast glass waveguides is predicted. Expand
Fabrication and Replication of Polymer Integrated Optical Devices Using Electron-Beam Lithography and Soft Lithography †
Polymeric integrated optical devices, including microring resonator optical filters and Mach−Zehnder interferometer modulators, fabricated by electron-beam lithography and soft lithography areExpand
...
1
2
3
4
5
...