Heuristic algorithms for scheduling an automated wet-etch station

@article{Bhushan2004HeuristicAF,
  title={Heuristic algorithms for scheduling an automated wet-etch station},
  author={Swarnendu Bhushan and Iftekhar A. Karimi},
  journal={Computers & Chemical Engineering},
  year={2004},
  volume={28},
  pages={363-379}
}
Abstract Wet-etching is a key step in wafer fabrication. A wet-etch station is a chemical batch process involving a complex interplay of mixed intermediate storage (MIS) policies and a shared robot for wafer transfers. Its operation poses a challenging resource-constrained scheduling problem that is crucial for enhancing productivity, improving yield and minimizing contamination. In this paper, we develop three new algorithms for scheduling wafer jobs for a given sequence, which comfortably… CONTINUE READING

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