Helium ion microscope: A new tool for nanoscale microscopy and metrology

@inproceedings{Ward2006HeliumIM,
  title={Helium ion microscope: A new tool for nanoscale microscopy and metrology},
  author={Billy W. Ward and John A Notte and Nicholas P. Economou},
  year={2006}
}
ALIS Corporation has developed a new helium ion microscope which has many advantages over both traditional scanning electron microscopes (SEMs) and focused ion beams (FIBs). This new technology is expected to produce an ultimate focused spot size of 0.25nm. This high resolution is attributed to the high source brightness (B>4×109A∕cm2sr), low energy spread (ΔE∕E∼2×10−5), and small diffraction effects (λ∼80fm). The interaction of helium ions with matter offers several valuable contrast… CONTINUE READING

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