• Corpus ID: 119283425

Heat and Mass Transfer during Chemical Vapor Deposition on the Particle Surface Subjected to Nanosecond Laser Heating

@article{Peng2016HeatAM,
  title={Heat and Mass Transfer during Chemical Vapor Deposition on the Particle Surface Subjected to Nanosecond Laser Heating},
  author={Quan Peng and Yuwen Zhang and Ya-Ling He and Yijin Mao},
  journal={arXiv: Computational Physics},
  year={2016}
}
A thermal model of chemical vapor deposition of titanium nitride (TiN) on the spherical particle surface under irradiation by a nanosecond laser pulse is presented in this paper. Heat and mass transfer on a single spherical metal powder particle surface subjected to temporal Gaussian heat flux is investigated analytically. The chemical reaction on the particle surface and the mass transfer in the gas phase are also considered. The surface temperature, thermal penetration depth, and deposited… 

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The authors acknowledge the support for this research by the Office of Naval Research (grant #N00014-95-1-0978).
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