Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise

@article{Snell2021HeatTI,
  title={Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise},
  author={Nikaya Snell and Chang Zhang and Gengyang Mu and Alex Bouchard and Raphael St-Gelais},
  journal={arXiv: Applied Physics},
  year={2021}
}
Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of heat transport in SiN resonators as well as their sensing noise limitations is of interest, both of which are goals of the present work. We first present new experimental results on radiative heat transport in SiN membrane, which we use for benchmarking two… 

Figures from this paper

Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon substrate. We…

References

SHOWING 1-10 OF 32 REFERENCES
High resolution measurement of near-field radiative heat transfer enabled by nanomechanical resonators
Near-field radiative heat transfer (NFHT) research currently suffers from an imbalance between numerous theoretical studies, as opposed to experimental reports that remain, in proportion, relatively…
Thermal conductivity of silicon nitride membranes is not sensitive to stress
We have measured the thermal properties of suspended membranes from 10 to 300 K for two amplitudes of internal stress (about 0.1 and 1 GPa) and for two different thicknesses (50 and 100 nm). The use…
Noise processes in nanomechanical resonators
Nanomechanical resonators can be fabricated to achieve high natural resonance frequencies, approaching 1 GHz, with quality factors in excess of 10^(4). These resonators are candidates for use as…
Nanomechanical torsional resonators for frequency-shift infrared thermal sensing.
TLDR
By modeling the fundamental noise processes, it is projected that further reduction of device size can significantly improve thermal responsivity and a room-temperature NETD below 10 mK appears feasible.
Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3Ο‰-VΓΆlklein method.
TLDR
The method has been applied to measure thermal properties of low stress silicon nitride and polycrystalline diamond membranes with thickness ranging from 100 nm to 400 nm and support a significant grain size effect on the thermal transport.
Frequency fluctuations in silicon nanoresonators
TLDR
This work shows that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise, and proposes a new method to show this was due to the presence of frequency fluctuations, of unexpected level.
Fundamental Sensitivity Limitations of Nanomechanical Resonant Sensors Due to Thermomechanical Noise
Nanomechanical resonators are used as high performance sensors of physical stimuli such as force and mass changes. Any such physical stimulus produces a shift in the resonance frequency of the…
12 βˆ’ ΞΌ m -Pitch Electromechanical Resonator for Thermal Sensing
We provide here a demonstration of 12-mu m-pitch nanoelectromechanical resonant infrared sensors with fully integrated capacitive transduction. A low-temperature fabrication process is used to…
Noise in microelectromechanical system resonators
  • J. Vig, Yoonkee Kim
  • Physics, Engineering
    IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
  • 1999
TLDR
The frequency noise due to temperature fluctuations, Johnson noise, and adsorption/desorption are likely to limit the applications of ultra-small resonators at submicron dimensions.
Nanowatt Thermal Radiation Sensing using Silicon Nitride Nanomechanical Resonators
Nanomechanical resonators are immune to electrical Johnson noise [1], making them a promising solution for infrared and terahertz radiation sensing beyond the performance of traditional thermal…
...
1
2
3
4
...