Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise

  title={Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise},
  author={Nikaya Snell and Chang Zhang and Gengyang Mu and Alex Bouchard and Raphael St-Gelais},
  journal={arXiv: Applied Physics},
Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of heat transport in SiN resonators as well as their sensing noise limitations is of interest, both of which are goals of the present work. We first present new experimental results on radiative heat transport in SiN membrane, which we use for benchmarking two… 

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