Hard Transparent Arrays for Polymer Pen Lithography.

Abstract

Patterning nanoscale features across macroscopic areas is challenging due to the vast range of length scales that must be addressed. With polymer pen lithography, arrays of thousands of elastomeric pyramidal pens can be used to write features across centimeter-scales, but deformation of the soft pens limits resolution and minimum feature pitch, especially… (More)
DOI: 10.1021/acsnano.6b00528

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