Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode

@article{Trusov2009GyroscopeAW,
  title={Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode},
  author={A. A. Trusov and A. R. Schofield and A. M. Shkel},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2009},
  pages={660-663}
}
This paper reports, for the first time, a vibratory MEMS z-axis rate gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled, dynamically balanced anti-phase sense-mode. The new design utilizes two symmetrically-decoupled tines with drive- and sense-mode synchronization mechanisms, and prioritizes sense-mode quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion and eliminates the lower frequency spurious modes… CONTINUE READING
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3 Excerpts

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