Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties

@inproceedings{Gall1998GrowthOP,
  title={Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties},
  author={Dietrich Gall and Ivan Petrov and Niklas Hellgren and Lars Hultman and J. ‐E. Sundgren and Joseph E. Greene},
  year={1998}
}
ScN layers, 345 nm thick, were grown on MgO ~001! substrates at 750 °C by ultrahigh-vacuum reactive magnetron sputter deposition in pure N 2 discharges at 5 mTorr. The N 2 1 to Sc ratio incident at the substrate and growing film was maintained constant at 14, while the ion energy EN 2 1 was varied from 13 to 50 eV. All films were stoichiometric with N/Sc ratios of 1.00 60.02. However, microstructural and surface morphological evolution were found to depend strongly on EN 2 1 . The nucleation… CONTINUE READING

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