Growth of highly transparent nanocrystalline diamond films and a spectroscopic study of the growth

@inproceedings{Chen2001GrowthOH,
  title={Growth of highly transparent nanocrystalline diamond films and a spectroscopic study of the growth},
  author={L. C. Chen and Padmakar D. Kichambare and K. H. Chen and Jan-Jan Wu and Jer Ren Yang and Shyh Tsong Lin},
  year={2001}
}
A series of nanocrystalline diamond films with grain size ranged from 4 nm to a few hundreds of nanometers were grown by microwave plasma enhanced chemical vapor deposition. Effects of the substrate pretreatment and the methane fraction in the source gas on the microstructure, surface roughness, and optical transmittance of the resultant films were studied. Specifically, comparison was made between two different sizes, 4 nm and 0.1 μm, of the diamond powder used for substrate pretreatment… CONTINUE READING