# Growth of ${\rm MgB}_{2}$ Thin Films In Situ by RF Magnetron Sputtering With a Pocket Heater

@article{Lee2009GrowthO,
title={Growth of \$\{\rm MgB\}_\{2\}\$ Thin Films In Situ by RF Magnetron Sputtering With a Pocket Heater},
author={Sanghan Lee and Ke Chen and Seung Hyup Baek and Wenqing Dai and B. H. Moeckly and Qi Li and Xiao Xing Xi and M Rzchowski and C. B. Eom},
journal={IEEE Transactions on Applied Superconductivity},
year={2009},
volume={19},
pages={2811-2814}
}
We have grown MgB2 thin films using RF magnetron sputtering combined with a pocket heater. This technique relies on a low-pressure environment for sputter deposition of boron and a high-pressure environment for thermal evaporation of Mg. We have obtained superconducting MgB2 thin films using substrate temperatures of 480-540degC and Mg furnace temperatures of 730-750degC. The Tc onset of the thin films increased from 21.6 K to 35 K with increasing substrate temperature due to better… CONTINUE READING