Growth mode control of the free carrier density in SrTiO3−δ films

  title={Growth mode control of the free carrier density in SrTiO3−$\delta$ films},
  author={Akira Ohtomo and Harold Y. Hwang},
  journal={Journal of Applied Physics},
We have studied the growth dynamics and electronic properties of SrTiO3−δ homoepitaxial films by pulsed laser deposition. We find that the two dominant factors determining the growth mode are the kinetics of surface crystallization and of oxidation. When matched, persistent two-dimensional layer-by-layer growth can be obtained for hundreds of unit cells. By tuning these kinetic factors, oxygen vacancies can be frozen in the film, allowing controlled, systematic doping across a metal-insulator… Expand
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We report bulk-quality n-type SrTiO3 (n-SrTiO3) thin films fabricated by pulsed laser deposition, with electron mobility as high as 6600 cm2 V−1 s−1 at 2 K and carrier density as low as 2.0×1018 cm−3Expand
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Abstract We study the structure and surface morphology of the 100 nm homoepitaxial LaAlO 3 films grown by pulsed laser deposition in a broad range of growth parameters. We show that there is a narrowExpand
Two components for one resistivity in LaVO3/SrTiO3 heterostructure.
  • H. Rotella, O. Copie, +6 authors W. Prellier
  • Materials Science, Medicine
  • Journal of physics. Condensed matter : an Institute of Physics journal
  • 2015
A series of 100 nm LaVO3 thin films have been synthesized on (0 0 1)-oriented SrTiO3 substrates using the pulsed laser deposition technique, and the effects of growth temperature are analyzed.Expand
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This work shows that, through proper control of the plume kinetic energy, stoichiometric crystalline films can be synthesized without generating oxygen defects even in high vacuum, and expands the utility of pulsed laser epitaxy of other materials as well. Expand
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We have mapped the growth mode of homoepitaxial SrTiO3 thin films as a function of deposition rate and substrate temperature during pulsed laser deposition. The transition from layer by layer growthExpand
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Nonstoichiometry in SrTiO3
The defect chemistry of polycrystalline has been studied by means of the equilibrium electrical conductivity as a function of temperature, oxygen activity, Sr/Ti ratio, and impurity additions.Expand