Growth mode control of the free carrier density in SrTiO3−δ films

@article{Ohtomo2007GrowthMC,
  title={Growth mode control of the free carrier density in SrTiO3−$\delta$ films},
  author={Akira Ohtomo and Harold Y. Hwang},
  journal={Journal of Applied Physics},
  year={2007},
  volume={102},
  pages={083704}
}
We have studied the growth dynamics and electronic properties of SrTiO3−δ homoepitaxial films by pulsed laser deposition. We find that the two dominant factors determining the growth mode are the kinetics of surface crystallization and of oxidation. When matched, persistent two-dimensional layer-by-layer growth can be obtained for hundreds of unit cells. By tuning these kinetic factors, oxygen vacancies can be frozen in the film, allowing controlled, systematic doping across a metal-insulator… Expand
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